Chemical Safety Science, 2018, Volume 2, No 2, p. 57 — 62
Novel functional materials
UDC 544.473:547.322 Download PDF (RUS)
DOI: 10.25514/CHS.2018.2.14102
FEMTOSECOND LASER TECHNOLOGY FOR NANOSTRUCTURING DIELECTRIC SURFACE
V. A. Nadtochenko*, A. A. Astafiev, A. V. Aibush, A. A. Gulin, A. D. Zalessky, A. N. Kostrov, A. S. Krivokharchenko, A. A. Osychenko, A. A. Titov, M. S. Syrchina, and A. M. Shakhov
Semenov Institute of Chemical Physics, Russian Academy of Sciences, Moscow, Russia
Received October 24, 2018
Published December 26, 2018
Abstract – The results for nanostructuring glass surface with subdiffraction spatial resolution using femtosecond laser radiation focused by core/shell type Au/SiO2 microspheres are presented. A spatial resolution value of 110 nm has been achieved by applying laser radiation at a wavelength of 780 nm. An appropriate mechanism for glass ablation is proposed. The technique opens up new opportunities for creating microfluidic and sensor devices based on Lab-on-Chip technology which can be successfully applied for detecting toxic and explosive substances.
Keywords: femtosecond laser, nanostructuring surface, ablation, sensor.
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